Metrology
Metrology
MarSurf WM 100
EN
High-precision white light interferometry
The MarSurf WM 100 with new camera and functionally enlarged Interferometer Software offers sub-nanometer-resolution and precision.

Key benefits:

  • Maximum precision with sub-nanometer resolution and measuring accuracy
  • Fast and simple measurements- reliable results
  • Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue
  • Three different measuring modes: VSI, EPSI and PSI
  • Special evaluation mode for lambda/2 steps
  • 2D surface analysis and measurement evaluations
  • Topographical 3D surface analysis and measurement evaluations
  • Manual table and object positioning in up to 4 axes
  • Wide choice of lenses for perfect adjustment to the measuring object
  • Sturdy design with granite base plate
  • Technical data
  • Applications
  • Accessories
  • Shipment

Measuring principle
By interferometer, by white light interferometer
Light source (WLI): LED, 505 nm
Measuring range mm
Sensor unit can be moved manually over 200 mm in Z
Object table can be moved manually in X and Y

Interferometer, white light interferometer:
Measuring range (WLI): Up to 100 µm (vertical). More on request.
Interfaces
230 V, 50 Hz

Mechanical Engineering
To qualify and quantify roughness of metal surfaces (ground, rolled, etc.)

Electronics and semiconductors
Surface analysis of coatings, measurement and analysis of electronic and semi-conductor components

Medical Technology
Metal, ceramic and plastic surfaces of implants, prostheses and Instruments

Optics
Roughness analysis of optical components (all sorts of, all materials) 

Optional:
  • CT 120 two-axis tilting table
  • tilting table for large angles  +/- 30°
  • Set of standards
  • WLI Objective lenses
    2.5x0.075;  5x0.13;  10x0.3;  20x0.4;  50x0.55;  100x0.7
  • MarSurf MfM for professional evaluation, graphical representation and creation of measuring records
    (choice of Standard, Extended or Premium Version)
  • Active vibration isolation system
    (for optimum damping for measurements in the nanometer and sub-nanometer range)

Sensor system consists of:
  • WLI sensor head
    - Camera, 1280 x 1024 pixels, up to 169 fps
    - 100 µm piezo drive z-measuring head
  • WLI software module, operating Software
  • PC with Win 10 and 24" screen
  • Granite base and column with manual positioning of sensor system
  • Manual XY object table for object positioning
  • 20x0.4 DI lens (white light Interferometer)