Metrology
Metrology
MarSurf CWM 100
EN
The precision, computer-controlled optical measuring instrument MarSurf CWM 100 with sub-nanometer resolution. A combined 3D measuring system comprising a confocal microscope and white light interferometer
Advantages
  • Special microscope technology dedicated to the reproduction of tiny surface features up to the physical limit
  • Surface scanning in video real time technology for fast and reliable results
  • Large selection of highest quality objectives
  • Measurement of topography, height, shape and position of elements and structures
  • Robust, maintenance free, built for long service life
  • Technical data
  • Applications
  • Accessories
  • Shipment

Measuring principle
By interferometer, by white light interferometer and confocal
Light source (KFM and WLI): High-power LED, 505 nm
Measuring range mm
Sensor unit can be moved 100 mm in Z, CNC controlled
Object table can be moved 100 mm in X and Y, CNC controlled

Interferometer, white light interferometer:
Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode

Confocal microscope:
Measuring range (KFM): Up to 10 mm (depending on resolution in Z and lens)
Interfaces
230 V, 50 Hz

Machine building
All types of metal surfaces (ground, rolled, etc.), also laser-structured surfaces, ceramic and plastic surfaces, mold surfaces

Medicine
Metal, ceramic and plastic surfaces of implants, prostheses and instruments

Electronics

Surface analysis of coatings, measurement and analysis of electronic and semiconductor components

Optics

Form and roughness analysis of various optical components (all materials)

CT 120 two-axis tilting table

Setting table angle +/- 30°

Standards set

Confocal microscope:

KFM objective lenses 10x0.5;  20x0.75;  50x0.8;  100x0.9;  More KFM objective lenses, also with extra large working distance, on request

White light interferometer:

WLI objective lenses 2.5x0.075;  5x0.13;  10x0.3;  20x0.4;  50x0.55;  100x0.7

  • Sensor system, comprising:
    • Confocal microscope KFM with 6x nosepiece
    • Camera, 780 x 580 pixels, up to 48 images/s (standard version)
    • 100 mm CNC-controlled Z-axis with integrated Heidenhain glass scale
    • WLI software module, "Inspector" software
  • Granite base frame and column with sensor system and CNC-controlled object table
  • Motorized multiaxis control for Z-axis and XY table for probe positioning and image field merging
  • Lenses (optional):
    • 4x to 150x (confocal microscope)
    • 2.5x to 100x (white light interferometer)