- 3D white light interferometer measuring system
- Maximum precision with sub-nanometer resolution and measuring accuracy
- Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue
- 2D surface analysis and measurement evaluations
- Topographical 3D surface analysis and measurement evaluations
- Fast measurements - short measuring times
- Manual table and object positioning in up to 4 axes
- Wide choice of lenses for perfect adjustment to the measuring object
- Sturdy design with granite base plate
- Professional evaluation software based on MountainsMap©
- Technical data
- Applications
- Accessories
- Shipment
Measuring principle | By interferometer, by white light interferometer Light source (WLI): LED, 505 nm |
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Measuring range mm | Sensor unit can be moved manually over 200 mm in Z Object table can be moved manually in X and Y Interferometer, white light interferometer: Measuring range (WLI): Up to 100 µm (vertical). More on request. |
Interfaces | 230 V, 50 Hz |
Machine building
- All types of metal surfaces (ground, rolled, etc.)
- Laser structured surfaces, fine ceramic and plastic surfaces, mold surfaces
Medicine- Metal, ceramic and plastic surfaces of implants, prostheses and instruments
Electronics- Surface analysis of coatings, measurement and analysis of electronic and semi-conductor components
Optics- Roughness analysis of various optical components (all materials)
- CT 120 2 axis tilting table
- Setting table angle +/- 30°
- Standards set
- White light interferometer WLI objective lenses:
- 2,5x0,075; 5x0,13; 10x0,3; 20x0,4; 50x0,55; 100x0,7
Optional: Active vibration dampening table for optimal measurements in the nanometer and sub-nanometer range
- Sensor system:
- WLI sensor head
- Camera, 768 x 582 pixels, up to 48 f/s
- 100 µm piezo drive z-measuring head
- WLI software module, operating software
- Granite base and column with manual positioning of sensor system
- Manual XY object table for object positioning
- 20x0.4 DI lens (white light interferometer)