MarSurf WM 100 - Mahr Metrology

Maximum precision with sub-nanometer resolution and measuring accuracy
Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue
2D surface analysis and measurement evaluations
Topographical 3D surface analysis and measurement evaluations
Fast measurements - short measuring times
Manual table and object positioning in up to 4 axes
Wide choice of lenses for perfect adjustment to the measuring object
Sturdy design with granite base plate
Professional evaluation software based on MountainsMap^©

Measuring principle	By interferometer, by white light interferometer Light source (WLI): LED, 505 nm
Measuring range mm	Sensor unit can be moved manually over 200 mm in Z Object table can be moved manually in X and Y Interferometer, white light interferometer: Measuring range (WLI): Up to 100 µm (vertical). More on request.
Interfaces	230 V, 50 Hz

Machine building

All types of metal surfaces (ground, rolled, etc.)
Laser structured surfaces, fine ceramic and plastic surfaces, mold surfaces
Medicine
Metal, ceramic and plastic surfaces of implants, prostheses and instruments
Electronics
Surface analysis of coatings, measurement and analysis of electronic and semi-conductor components
Optics
Roughness analysis of various optical components (all materials)

CT 120 2 axis tilting table
Setting table angle +/- 30°
Standards set
White light interferometer WLI objective lenses:
- 2,5x0,075; 5x0,13; 10x0,3; 20x0,4; 50x0,55; 100x0,7
Optional: Active vibration dampening table for optimal measurements in the nanometer and sub-nanometer range

Sensor system:
- WLI sensor head
- Camera, 768 x 582 pixels, up to 48 f/s
- 100 µm piezo drive z-measuring head
- WLI software module, operating software
Granite base and column with manual positioning of sensor system
Manual XY object table for object positioning
20x0.4 DI lens (white light interferometer)