Metrology
Metrology
MarSurf UD 130 Combined contour and surface measuring station
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MarSurf UD 130
The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130/LD 260 and the new standard combination measuring station MarSurf VD 140/280 with two probe systems.
The technical specifications of the MarSurf UD 130 are based on the interferometric probe system and the positioning speeds that reduce the measuring time for each workpiece.



  • Technical data

Resolution
2 nm
Start of traversing length (in X)
0.1 mm
End of traversing length (in X)
130 mm
Positioning speed
0.1 mm/s to 30 mm/s
Measuring speed
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
Probe
Standard probe LP-D 14-10-2/60°
Measuring range mm

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

Profile resolution
2 nm
Traversing lengths
0.1 mm to 130 mm
Measuring force (N)
1 mN to 30 mN, software-adjustable