Metrology
Metrology
MarSurf CM explorer
EN
The flexible all-round measuring solution
The MarSurf CM explorer is a compact confocal microscope for the three dimensional measurement and analysis of surfaces – non-tactile, independent of material and fast.

Thanks to its robust construction and its insensitivity to environmental influences, the MarSurf CM explorer is not only suitable for use in test laboratories, but is also optimally equipped for quality assurance in production environments.

Your top advantages:
  • High measuring speed – even at full resolution
  • User-friendly concept
  • Safety through collision detection in all directions to protect your workpiece and measuring system
  • High Dynamic Range (HDR) function 16 bits
  • Consistently high resolution even with large measurement areas thanks to HD stitching

The established optical measuring system is successfully used, for example, for:
  • Roughness measurement according to DIN EN ISO 4287 / 25178
  • Topography measurement (including volume, wear, isotropy)
  • Measurement of microgeometry and layer thicknesses

Users value the MarSurf CM exploreras a reliable measuring system that provides quantitative traceable 3D characteristics for many industries – for example:
  • Automotive industry
  • Medical technology
  • Metal Industry
  • Microelectronics
  • Microelectronics
  • Optics

  • Technical data
  • Applications
  • Shipment

Measuring principle

Confocal 
High-performance LED (505nm/white)

Mechanical Engineering
To qualify and quantify roughness, geometry and wear volume  

Electronics and semiconductors
Component inspection down to the sub-micrometer range for defect-free products

Medical Technology
Quality assurance of medical surfaces in production and laboratory

Material Science
Optimization of functional properties of new surfaces and products

Microsystems Technology
Measure complex surface geometries of smallest components with nanometer precision

MarSurf CM explorer
  • Confocal measuring head
    • HDR camera (B/W or color camera)
    • 4x lens revolver with identification
  • L tripod incl. control electronics
  • Motorized XY table (50x50mm) with glass scales for sample positioning and image field merging ("stitching")
  • Motorized Z-axis (70mm) with glass measuring scale 
  • Measuring system computer incl. 24“ TFT monitor
  • Lenses:
    • 5x to 100x selectable
  • MarSurf MSW for intuitive data acquisition
  • MarSurf MfM for professional evaluation, graphic presentation and creation of measuring records
    (Standard, Extended, Premium version selectable)