Metrology

Metrology
MarSurf CWM 100
EN
MarSurf CWM 100, a precision, computer-controlled optical measuring instrument with sub-nanometer resolution. This combined 3D measuring system comprises a confocal microscope and white light interferometer.
  • Highest precision with sub-nanometer resolution
  • Universal suitability for technical, optical and reflective surfaces. Also for surfaces of printed circuit boards and semiconductor products as well as biological tissues
  • 2D surface analysis and measuring evaluations
  • Topographic 3D surface analysis and measuring evaluations
  • Intelligent measuring strategies - fast measurements – short measuring times
  • Microscope image field sizes, easily expandable by fully automatic stitching
  • Automatic table or object positioning: 100 mm x 100 mm, longer distances on request
  • A wide range of lenses allows for an ideal adaptation to the measurement object
  • Solid construction with granite base plate and granite column for the best possible vibration damping
  • Professional evaluation software based on MountainsMap ©
  • Technical data
  • Applications
  • Accessories
  • Shipment

Measuring principle
By interferometer, by white light interferometer and confocal
Light source (KFM and WLI): LED, 505 nm
Measuring range mm
Sensor unit can be moved 100 mm in Z, CNC controlled
Object table can be moved 100 mm in X and Y, CNC controlled

Interferometer, white light interferometer:
Measuring range (WLI): More as 4 mm (Standard mode), more as 20 mm in extended mode

Confocal microscope:
Measuring range (KFM): Up to 10 mm (depending on resolution in Z and lens)
Interfaces
230 V, 50 Hz

Machine building
All types of metal surfaces (ground, rolled, etc.), also laser-structured surfaces, ceramic and plastic surfaces, mold surfaces

Medicine
Metal, ceramic and plastic surfaces of implants, prostheses and instruments

Electronics

Surface analysis of coatings, measurement and analysis of electronic and semiconductor components

Optics

Form and roughness analysis of various optical components (all materials)

CT 120 two-axis tilting table

Setting table angle +/- 30°

Standards set

Confocal microscope:

KFM objective lenses 10x0.5;  20x0.75;  50x0.8;  100x0.9;  More KFM objective lenses, also with extra large working distance, on request

White light interferometer:

WLI objective lenses 2.5x0.075;  5x0.13;  10x0.3;  20x0.4;  50x0.55;  100x0.7

  • Sensor system, comprising:
    • Confocal microscope KFM with 6x nosepiece
    • Camera, 780 x 580 pixels, up to 48 images/s (standard version)
    • 100 mm CNC-controlled Z-axis with integrated Heidenhain glass scale
    • One operating software with WLI and confocal software modules
  • Granite base frame and column with sensor system and CNC-controlled object table
  • CNC-controled motorized Z-axis and XY table for probe positioning and image field merging
  • Lenses (optional):
    • 4x to 150x (confocal microscope)
    • 2.5x to 100x (white light interferometer)