Metrology
Metrology
MarSurf WM 100
EN
  • The new high-precision white light interferometer measuring system MarSurf WM 100. With new camera, functionally enlarged Interferometer Software and Win 10 os.
  • Maximum precision with sub-nanometer resolution and measuring accuracy
  • Suitable for all optical and reflective surfaces, fine technical surfaces and surfaces of circuit boards, semi-conductor products and biological tissue
  • Three different measuring modes: VSI, EPSI and PSI
  • Special evaluation mode for lambda/2 steps
  • 2D surface analysis and measurement evaluations
  • Topographical 3D surface analysis and measurement evaluations
  • Fast and simple measurements - reliable results
  • Manual table and object positioning in up to 4 axes
  • Wide choice of lenses for perfect adjustment to the measuring object
  • Sturdy design with granite base plate
  • Professional evaluation software based on MountainsMap©
  • Technical data
  • Applications
  • Accessories
  • Shipment

Measuring principle
By interferometer, by white light interferometer
Light source (WLI): LED, 505 nm
Measuring range mm
Sensor unit can be moved manually over 200 mm in Z
Object table can be moved manually in X and Y

Interferometer, white light interferometer:
Measuring range (WLI): Up to 100 µm (vertical). More on request.
Interfaces
230 V, 50 Hz

Machine building
  • All types of metal surfaces (ground, rolled, etc.)
  • Laser structured surfaces, fine ceramic and plastic surfaces, mold surfaces

  • Medicine
  • Metal, ceramic and plastic surfaces of implants, prostheses and instruments

  • Electronics

  • Surface analysis of coatings, measurement and analysis of electronic and semi-conductor components

  • Optics

  • Roughness analysis of optical components (all sorts of, all materials)

CT 120 two-axis tilting table

Setting table angle +/- 30°

Standards set


White light interferometer:

WLI objective lenses 2.5x0.075;  5x0.13;  10x0.3;  20x0.4;  50x0.55;  100x0.7

Optional:
  • With active vibration damping for optimum damping for measurements in the nanometer and sub-nanometer range

  • Sensor system:
    • WLI sensor head
    • Camera, 1280 x 1024 pixels, up to 169 fps
    • 100 µm piezo drive z-measuring head
    • WLI software module, operating Software
      PC with Win 10 and 24" screen
  • Granite base and column with manual positioning of sensor system
  • Manual XY object table for object positioning
  • 20x0.4 DI lens (white light interferometer)