計測技術
計測技術
MarSurf UD 130 輪郭および表面測定ステーションの組み合わせ
JA
MarSurf UD 130
Mahr replace with the MarSurf UD 130 the successful MarSurf UD 120 and closed the gap between the high end solution MarSurf LD 130/LD 260 and the standard combination measuring station MarSurf XCR 20 with two drive units.
The technical specification of the MarSurf UD 130 is far superior to that of the MarSurf UD 120: in particular, the measuring and positioning speeds have reduced the measuring time for each workpiece.
  • 技術データ

分解能
2 nm
測定速度(テキスト)
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
位置決め速度(テキスト)
0.1 mm/s to 30 mm/s
ラバース長の始点 (X)
0.1 mm
ラバース長のエンド (X)
130 mm
入力
Standard probe LP-D 14-10-2/60°
測定範囲

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

分解能詳細
2 nm
トラバース長(テキスト)
0.1 mm to 130 mm
測定力 (N)
1 mN to 30 mN, software-adjustable