計測技術
計測技術
MarSurf UD 130 輪郭および表面測定ステーションの組み合わせ
JA

MarSurf UD 130
The MarSurf UD 130 closes the gap between the high-end solution MarSurf LD 130/LD 260 and the new standard combination measuring station MarSurf VD 140/280 with two probe systems.
The technical specifications of the MarSurf UD 130 are based on the interferometric probe system and the positioning speeds that reduce the measuring time for each workpiece.



  • 技術データ

分解能
2 nm
測定速度(テキスト)
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
位置決め速度(テキスト)
0.1 mm/s to 30 mm/s
ラバース長の始点 (X)
0.1 mm
ラバース長のエンド (X)
130 mm
入力
Standard probe LP-D 14-10-2/60°
測定範囲

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

分解能詳細
2 nm
トラバース長(テキスト)
0.1 mm to 130 mm
測定力 (N)
1 mN to 30 mN, software-adjustable