계측 솔루션
계측 솔루션
MarSurf UD 130 윤곽선 및 표면 측정 스테이션 결합
KO
MarSurf UD 130
Mahr replace with the MarSurf UD 130 the successful MarSurf UD 120 and closed the gap between the high end solution MarSurf LD 130/LD 260 and the standard combination measuring station MarSurf XCR 20 with two drive units.
The technical specification of the MarSurf UD 130 is far superior to that of the MarSurf UD 120: in particular, the measuring and positioning speeds have reduced the measuring time for each workpiece.
  • 기술 데이터

측정 속도 (텍스트)
0.1 mm/s to 5 mm/s;
for roughness measurements
0.1 mm/s to 0.5 mm/s are recommended
해상도
2 nm
측정 길이 시작 (X)
0.1 mm
측정 길이 끝 (X)
130 mm
위치 이동 속도(텍스트)
0.1 mm/s to 30 mm/s
입력
Standard probe LP-D 14-10-2/60°
측정 범위

10 mm (100 mm probe arm)
20 mm (200 mm probe arm)

프로파일 해상도
2 nm
측정 길이 (텍스트)
0.1 mm to 130 mm
측정력 (N)
1 mN to 30 mN, software-adjustable