Mahr | Product Announcement

Mahr and NanoFocus Announce New Product Series

| Press Office

Cooperation between the metrology specialists Mahr and NanoFocus continues with new products for 3D surface analysis. A new product line based on white-light interferometry will appear at the beginning of 2021.

High-resolution 3D measurement data and maximum ease of use – this is what Mahr promises with a new white light interferometry product line. The new systems, including automated solutions, will be launched at the beginning of next year. Their novel evaluation technology is based on artificial intelligence (AI), which allows the highest accuracy to be achieved with increased robustness. The systems offer a resolution of down to 0.1 nm, making them ideal for use in the production of semiconductor devices or optical components, among other things.

Customers benefit from the compact design and easy, intuitive operation. In addition, the new white-light interferometers use the proven Mountains for Mahr (MfM) evaluation software, which allows 2D and 3D parameters to be evaluated in just a few steps. But also complex analyses of planar features – for example isotropy, volume or layer thickness – are easily possible with the MfM software. 3D reconstructions and superimposed reflection images clearly illustrate the surface properties.

"The joint software for confocal microscopes and white light interferometers makes it very easy to compare and select the best technology," explains Manuel Hüsken, Managing Director and CSO of Mahr GmbH. "With the new product line, Mahr is consistently expanding its portfolio of optical measuring instruments and positioning itself as a strong solution provider in metrology across technologies".

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3D reconstruction of 20 nm standard created by one of the new measurement systems.

Image: Mahr GmbH

300 dpi (2125 x 1594 px)

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